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20082024
most citedMonolithically Integrated Perovskite Semiconductor Lasers on Silicon Photonic Chips by Scalable Top-Down Fabrication

130 citations · 444 across the 12 of their papers we have counts for

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Showing 2018Show all

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physics.app-ph2018★ 3 cited

Overlay Accuracy Limitations of Soft Stamp UV Nanoimprint Lithography and Circumvention Strategies for Device Applications

Piotr Jacek Cegielski, Jens Bolten, Jung Wuk Kim +5

In this work multilevel pattering capabilities of Substrate Conformal Imprint Lithography (SCIL) have been explored. A mix & match approach combining the high throughput of nanoimp…