activity
20172026
most citedAll-optical lithography process for contacting atomically-precise devices

19 citations · 45 across the 5 of their papers we have counts for

collaborators

5 papers

cond-mat.mtrl-sci2026

Atomically precise mechanosynthesis of carbon structures on hydrogenated Si(100) by inverted-mode STM

Megan Cowie, Chris Deimert, Ryan Groome +44

The ability to build atomically precise structures on surfaces with complete control over both atomic placement and chemical bonding remains a central challenge in nanoscale fabric…

cond-mat.mes-hall2025

Inverted-Mode Scanning Tunneling Microscopy for Atomically Precise Fabrication

Eduardo Barrera, Bheeshmon Thanabalasingam, Rafik Addou +57

Scanning Tunneling Microscopy (STM) enables fabrication of atomically precise structures with unique properties and growing technological potential. However, reproducible manipulat…

physics.app-ph2020★ 17 cited

Atomic Precision Advanced Manufacturing for Digital Electronics

Daniel R. Ward, Scott W. Schmucker, Evan M. Anderson +8

An exponential increase in the performance of silicon microelectronics and the demand to manufacture in great volumes has created an ecosystem that requires increasingly complex to…

cond-mat.mtrl-sci2020★ 9 cited

Low Thermal Budget High-k/Metal Surface Gate for Buried Donor-Based Devices

Evan M. Anderson, DeAnna M. Campbell, Leon N. Maurer +8

Atomic precision advanced manufacturing (APAM) offers creation of donor devices in an atomically thin layer doped beyond the solid solubility limit, enabling unique device physics.…

physics.app-ph2017★ 19 cited

All-optical lithography process for contacting atomically-precise devices

Daniel R. Ward, Michael T. Marshall, DeAnna M. Campbell +5

We describe an all-optical lithography process that can be used to make electrical contact to atomic-precision donor devices made in silicon using scanning tunneling microscopy (ST…