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Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers
Xuge Fan, Fredrik Forsberg, Anderson D. Smith +5
Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical s…
Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications
Xuge Fan, Anderson D. Smith, Fredrik Forsberg +8
Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes i…
Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers
Xuge Fan, Fredrik Forsberg, Anderson D. Smith +7
Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devic…