32 citations · 34 across the 3 of their papers we have counts for
3 papers
physics.app-ph2020★ 32 cited
A Cleanroom in a Glovebox
Mason J. Gray, Narendra Kumar, Ryan O'Connor +18
The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroo…
cond-mat.mtrl-sci2019★ 2 cited
Realization of 2D Crystalline Metal Nitrides via Selective Atomic Substitution
Jun Cao, Tianshu Li, Hongze Gao +5
Two-dimensional (2D) transition metal nitrides (TMNs) are new members in the 2D materials family with a wide range of applications. Particularly, highly crystalline and large area…
physics.app-ph2017
Channel resolution enhancement through scalability of nano/micro-scale thickness and width of SU-8 polymer based optical channels using UV lithography
Iraj S Amiri, Volker J. Sorger, M Ariannejad +2
This paper reports on an approach for fabrication of micro-channels with nanometer thickness achieved by optimization of UV lithography processes. Rectangular micro-channels with a…