24 citations · 125 across the 9 of their papers we have counts for
Showing physics.data-anShow all
2 papers · 1 filter
physics.data-an2020★ 12 cited
Efficient Bayesian inversion for shape reconstruction of lithography masks
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Background: Scatterometry is a fast, indirect and non-destructive optical method for quality control in the production of lithography masks. To solve the inverse problem in complia…
physics.data-an2019★ 8 cited
An efficient approach to global sensitivity analysis and parameter estimation for line gratings
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Scatterometry is a fast, indirect and nondestructive optical method for the quality control in the production of lithography masks. Geometry parameters of line gratings are obtaine…