24 citations · 125 across the 8 of their papers we have counts for
3 papers · 1 filter
Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Anna Andrle, Philipp Hönicke, Philipp Schneider +6
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Usi…
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Antireflective nanotextures for monolithic perovskite-silicon tandem solar cells
Klaus Jäger, Phillip Manley, Duote Chen +7
Recently, we studied the effect of hexagonal sinusoidal textures on the reflective properties of perovskite-silicon tandem solar cells using the finite element method (FEM). We saw…