Revisiting the anomalous rf field penetration into a warm plasma

Abstract

Radio frequency waves do not penetrate into a plasma and are damped within it. The electric field of the wave and plasma current are concentrated near the plasma boundary in a skin layer. Electrons can transport the plasma current away from the skin layer due to their thermal motion. As a result, the width of the skin layer increases when electron temperature effects are taken into account. This phenomenon is called anomalous skin effect. The anomalous penetration of the rf electric field occurs not only for transversely propagating to the plasma boundary wave (inductively coupled plasmas) but also for the wave propagating along the plasma boundary (capacitively coupled plasmas). Such anomalous penetration of the rf field modifies the structure of the capacitive sheath. Recent advances in the nonlinear, nonlocal theory of the capacitive sheath are reported. It is shown that separating the electric field profile into exponential and non-exponential parts yields an efficient qualitative and quantitative description of the anomalous skin effect in both inductively and capacitively coupled plasma.

44 pages, invited paper at "Nonlocal, Collisionless Phenomena in Plasma" workshop

References in corpus (4)

• Anomalous Capacitive Sheath with Deep Radio Frequency Electric Field Penetration
• Effect of Electron Energy Distribution Function on Power Deposition and Plasma Density in an Inductively Coupled Discharge at Very Low Pressures
• Self-consistent system of equations for a kinetic description of the low-pressure discharges accounting for the nonlocal and collisionless electron dynamics
• Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges

Cited by in corpus (13)

• The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges
• Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
• Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field
• Plasma density and ion energy control via driving frequency and applied voltage in a low pressure capacitively coupled plasma discharge
• Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges
• Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field
• High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
• Intense boundary emission destroys normal radio-frequency plasma sheath
• On the role of secondary electron emission in capacitively coupled radio frequency plasma sheath: a theoretical ground
• Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study
• Penetration depth of an electric field in a semi-infinite plasma
• Kinetic analysis of negative power deposition in low pressure plasmas
• Skin effect with arbitrary specularity in Maxwellian plasma