Self - Organized Si Dots On Ge Substrates
arXiv:cond-mat/0608660 · doi:10.1063/1.2729783
Abstract
The epitaxial growth conditions for silicon on germanium substrates were investigated as a function of growth temperature and monolayer coverage. Island formation was observed for the hole studied temperature range, although strong alloying with the substrate occurred for the highest temperatures. Carbon pre-deposition offers suitable nucleation centers for the Si island and reduction of alloying. pre-structured Ge substrates were prepared to enhance islanding and to achieve ordering.
presented 26.July 2006 at ICPS 2006 Vienna