Frequency comb generation in low-loss, low-stress, high-Q deuterated silicon nitride microring resonators in an 8-inch photonics platform

Abstract

Systematic studies on different SiN films in terms of propagation losses are presented, and deuterated SiN emerges as a good candidate for ultralow loss (< 0.1 dB/cm) and reliability by simple 8-inch process with low thermal budget. Frequency comb generation in high-Q (~1 million) deuterated silicon nitride microring is demonstrated and used for intensity modulated direct detection transmission. Negligible power penalty for 25.78 GBaud/s NRZ and PAM4 is achieved at error rates <10-6, below the FEC limit.