Frequency comb generation in low-loss, low-stress, high-Q deuterated silicon nitride microring resonators in an 8-inch photonics platform

Y. Cao, G. F. Chen, C. Lau +11

Systematic studies on different SiN films in terms of propagation losses are presented, and deuterated SiN emerges as a good candidate for ultralow loss (< 0.1 dB/cm) and reliabili…