A Methodology for Process Design Kit Re-Centering Using TCAD and Experimental Data for Cryogenic Temperatures

Abstract

In this work, we describe and demonstrate a novel Technology Computer Aided Design (TCAD) driven methodology to re-center room-temperature Process Design Kits (PDKs) for cryogenic operation using a limited set of experimental measurements. Unlike previous approaches that relied on direct fitting of sparse measurements, our technique accounts for process-induced deviations by calibrating TCAD models to both room-temperature and cryogenic data. Compact models for all process corners are extracted from TCAD-generated target characteristics, enabling accurate cryogenic modeling without dedicated foundry support. This scalable, technology-independent method provides a practical path for cryogenic circuit design.