Millimeter-scale active area superconducting microstrip single-photon detector fabricated by ultraviolet photolithography
arXiv:2304.06921 · doi:10.1364/OE.487024
Abstract
The effective and convenient detection of single photons via advanced detectors with a large active area is becoming significant for quantum and classical applications. This work demonstrates the fabrication of a superconducting microstrip single-photon detector (SMSPD) with a millimeter-scale active area via the use of ultraviolet (UV) photolithography. The performances of NbN SMSPDs with different active areas and strip widths are characterized. SMSPDs fabricated by UV photolithography and electron beam lithography with small active areas are also compared from the aspects of the switching current density and line edge roughness. Furthermore, an SMSPD with an active area of 1 mm * 1 mm is obtained via UV photolithography, and during operation at 0.85 K, it exhibits near-saturated internal detection efficiency at wavelengths up to 800 nm. At a wavelength of 1550 nm, the detector exhibits a system detection efficiency of ~5% (7%) and a timing jitter of 102 (144) ps, when illuminated with a light spot of ~18 (600) um in diameter, respectively.
arXiv comment13 pages, 5 figures, 1 table
References in corpus (21)
- Demonstrating sub-3 ps temporal resolution in a superconducting nanowire single-photon detector
- Detecting Infrared Single Photons with Near-Unity System Detection Efficiency
- High-speed measurement-device-independent quantum key distribution with integrated silicon photonics
- NbN superconducting nanowire single photon detector with efficiency over 90% at 1550 nm wavelength operational at compact cryocooler temperature
- Detecting Dark Matter with Superconducting Nanowires
- Theory of single photon detection by 'dirty' current-carrying superconducting strip based on the kinetic equation approach
- New Constraints on Dark Photon Dark Matter with Superconducting Nanowire Detectors in an Optical Haloscope
- Detecting single infrared photons toward optimal system detection efficiency
- Ultimate low system dark count rate for superconducting nanowire single-photon detector
- Optical single photon detection in micron-scaled NbN bridges
- Resolving photon numbers using a superconducting tapered nanowire detector
- Large-area microwire MoSi single-photon detectors at 1550 nm wavelength
- Superconducting microwire detectors with single-photon sensitivity in the near-infrared
- Enhancing intrinsic detection efficiency of superconducting nanowire single-photon detectors via helium ion irradiation
- Intrinsic timing jitter and latency in superconducting single photon nanowire detectors
- Superconducting microstrip single-photon detector with system detection efficiency over 90% at 1550 nm
- Superconducting nanowire single photon detection system for space applications
- A versatile, inexpensive integrated photonics platform
- Laser-lithographically written micron-wide superconducting nanowire single-photon detectors
- Current dependence of the hot-spot response spectrum of superconducting single-photon detectors with different layouts
- Improve photon number discrimination for a superconducting series nanowire detector by applying a digital matched filter
Cited by in corpus (3)
- An SNSPD-based detector system for NASA's Deep Space Optical Communications project
- Large active-area superconducting microwire detector array with single-photon sensitivity in the near-infrared
- Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation