MEMS for Photonic Integrated Circuits

Abstract

The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

References in corpus (4)

• Cavity Optomechanics
• Silicon Quantum Photonics
• Electrically driven quantum light emission in electromechanically-tuneable photonic crystal cavities
• PORT: A piezoelectric optical resonance tuner

Cited by in corpus (10)

• Experimentally realized in situ backpropagation for deep learning in nanophotonic neural networks
• Photonics for Neuromorphic Computing: Fundamentals, Devices, and Opportunities
• Piezo-optomechanical cantilever modulators for VLSI visible photonics
• 2023 Astrophotonics Roadmap: pathways to realizing multi-functional integrated astrophotonic instruments
• Piezoelectric actuation for integrated photonics
• Microcantilever-integrated photonic circuits for broadband laser beam scanning
• Dynamic strain modulation of a nanowire quantum dot compatible with a thin-film lithium niobate photonic platform
• Synchronous micromechanically resonant programmable photonic circuits
• Mechanical Sensors for Ultraheavy Dark Matter Searches via Long-range Forces
• Hybrid electrostatic-piezo MEMS photonic integrated modulators