MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
arXiv:2109.02913 · doi:10.1109/MEMS51782.2021.9375441
Abstract
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.
Accepted version of the paper