Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution

Abstract

Accurate deposition of nanoparticles at defined positions on a substrate is still a challenging task, because it requires simultaneously stable long-range transport and attraction to the target site and precise short-range orientation and deposition. Here we present a method based on geometry-induced energy landscapes in a nanofluidic slit for particle manipulation: Brownian motors or electro-osmotic flows are used for particle delivery to the target area. At the target site, electrostatic trapping localizes and orients the particles. Finally, reducing the gap distance of the slit leads sequentially to a focusing of the particle position and a jump into adhesive contact by several nanometers. For 60 nm gold spheres, we obtain a placement accuracy of 8 nm. The versatility of the method is demonstrated further by a stacked assembly of nanorods and the directed deposition of InAs nanowires.

arXiv comment7 pages, 5 figures

References in corpus (7)

• The Charge of Glass and Silica Surfaces
• The effect of integration time on fluctuation measurements: calibrating an optical trap in the presence of motion blur
• Nanofluidic Rocking Brownian Motors
• Experimental observation of current reversal in a rocking Brownian motor
• Accurate Location and Manipulation of Nano-Scaled Objects Buried under Spin-Coated Films
• Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution
• In-situ contrast calibration to determine the height of individual diffusing nanoparticles in a tunable confinement

Cited by in corpus (4)

• Template-Assisted Self Assembly of Fluorescent Nanodiamonds for Scalable Quantum Technologies
• Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution
• Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights
• Placement of Biological Membrane Patches in a Nanofluidic Gap with Control over Position and Orientation