Transmission Helium Ion Microscopy of Graphene

Abstract

We compare transmission He ion microscopy (HIM) to transmission electron microscopy (TEM) of graphene support films. We present spot transmission patterns that compare with scattering and range of ions in materials (SRIM) predictions, and show examples of scanning He${}^{+}$ transmission images, based on integrated camera intensity. We also consider the potential for coherent HIM scattering.

Draft of a conference proceedings paper: Ion Beam Analysis 2019 - to be published in Nucleation Instruments and Methods in Physics Research. Section B, Beam interactions with materials and atoms

Cited by in corpus (1)

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