A numerical ellipsometric analysis (NEA) of nanoscale layered systems

Abstract

A simple and robust method able to predict, with high accuracy, the optical properties of single and multi-layer nanostructures is presented. The method exploits a COMSOL Multiphysics simulation platform and it has been validated by three case studies with increasing numerical complexity: i) a single thin layer (20 nm) of Ag deposited on a glass substrate; ii) a metamaterial composed of five bi-layers of Ag/ITO (Indium Tin Oxide), with a thickness of 20 nm each; iii) a system based on a three-materials unit cell (AZO/ITO/Ag), but without any thickness periodicity (AZO stands for Al${}_2$O${}_3$/Zinc Oxide). Numerical results have been compared with experimental data provided by real ellipsometric measurements performed on the above mentioned nanostructures ad-hoc fabricated. The obtained agreement is excellent suggesting this research as a valid approach to design materials able to work in a broad spectrum range.

arXiv comment3 pages, 4 figures

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