Hybrid integrated semiconductor lasers with silicon nitride feedback circuits

Abstract

Hybrid integrated semiconductor laser sources offering extremely narrow spectral linewidth as well as compatibility for embedding into integrated photonic circuits are of high importance for a wide range of applications. We present an overview on our recently developed hybrid-integrated diode lasers with feedback from low-loss silicon nitride (Si3N4 in SiO2) circuits, to provide sub-100-Hz-level intrinsic linewidths, up to 120 nm spectral coverage around 1.55 um wavelength, and an output power above 100 mW. We show dual-wavelength operation, dual-gain operation, laser frequency comb generation, and present work towards realizing a visible-light hybrid integrated diode laser.

arXiv comment25 pages, 16 figures

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Cited by in corpus (16)

• Dynamics of soliton self-injection locking in a photonic chip-based microresonator
• Ultra-narrow linewidth hybrid integrated semiconductor laser
• Efficient photo-induced second harmonic generation in silicon photonics
• Invited Review: Micro-fabricated components for cold atom sensors
• Piezoelectric actuation for integrated photonics
• Semiconductor Laser Linewidth Theory Revisited
• Sub-kHz-linewidth external-cavity laser (ECL) with Si${}_3$N${}_4$ resonator used as a tunable pump for a Kerr frequency comb
• High-power and narrow-linewidth laser on thin-film lithium niobate enabled by photonic wire bonding
• Scalable switched slab coupler based optical phased array on silicon nitride
• Widely-tunable and narrow-linewidth hybrid-integrated diode laser at 637 nm
• Long-term absolute frequency stabilization of a hybrid-integrated InP-Si3N4 diode laser
• Hybrid integrated near UV lasers using the deep-UV Al2O3 platform
• A hybrid-integrated diode laser in the visible spectral range
• Hybrid integrated laser at visible wavelengths using aluminum nitride photonic integrated circuit
• Silicon nitride on-chip C-band spontaneous emission generation based on lanthanide doped microparticles
• Dual-laser self-injection locking to an integrated microresonator