Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks

Abstract

Nanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0$\pm$5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The lithographically precise patterning of large areas of diamond by self-assembled masks and their release into uniformly sized nanodiamonds open up new possibilities for quantum information processing and sensing.

arXiv comment15 pages, 2 figures

References in corpus (9)

• Nanometer scale quantum thermometry in a living cell
• Quantum Nonlinear Optics with a Germanium-Vacancy Color Center in a Nanoscale Diamond Waveguide
• All-optical initialization, readout, and coherent preparation of single silicon-vacancy spins in diamond
• Enhancement of the Zero Phonon Line emission from a Single NV-Center in a Nanodiamond via Coupling to a Photonic Crystal Cavity
• Large quantum superpositions of a levitated nanodiamond through spin-optomechanical coupling
• Imaging thermal conductivity with nanoscale resolution using a scanning spin probe
• Scanning nano-spin ensemble microscope for nanoscale magnetic and thermal imaging
• Bright and photostable single-photon emitter in silicon carbide
• Impact of surface functionalisation on the quantum coherence of nitrogen vacancy centres in nanodiamond