Sub-micrometer Nanostructure-based RGB Filters for CMOS Image Sensors

Abstract

Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of sub-micrometer RGB filter arrays for a pixel size down to 0.5 μm.

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• Magnetic light
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Cited by in corpus (5)

• Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference
• Laser-Induced Spatially-Selective Tailoring of High-Index Dielectric Metasurfaces
• Pixel-scale NIR-VIS Spectral Routers Based on 2D Mie-type Metagratings
• Nanostructure-modulated planar high spectral resolution spectro-polarimeter
• Spontaneous Parametric Down-Conversion from Resonant Metasurfaces