Micromachining of PMN-PT Crystals with Ultrashort Laser Pulses
arXiv:1811.12287 · doi:10.1007/s00339-019-2460-9
Abstract
Lead-magnesium niobate lead-titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature absence of extended cracks and well defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.
References in corpus (6)
- Strain-Tunable GaAs Quantum dot: A Nearly Dephasing-Free Source of Entangled Photon Pairs on Demand
- Strain-Tuning of the Optical Properties of Semiconductor Nanomaterials by Integration onto Piezoelectric Actuators
- Uniaxial stress flips the natural quantization axis of a quantum dot for integrated quantum photonics
- Fast beam steering with full polarization control using a galvanometric optical scanner and polarization controller
- Reversible Control of In-plane Elastic Stress Tensor in Nanomembranes
- Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators