Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators
arXiv:1702.00262 · doi:10.1063/1.4979859
Abstract
In this paper strain transfer efficiencies from single crystalline piezoelectric lead magnesium niobate-lead titanate (PMN-PT) substrate to a GaAs semiconductor membrane bonded on top are investigated using state-of-the-art x-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations. Two different bonding techniques are studied, namely gold-thermo-compression and polymer-based SU8 bonding. Our results show a much higher strain-transfer for the "soft" SU8 bonding in comparison to the "hard" bonding via gold-thermo-compression. A comparison between the XRD results and FEM simulations allows to explain this unexpected result with the presence of complex interface structures between the different layers.
arXiv comment17 pages, 7 Figures, 1 Table
References in corpus (4)
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- Energy-tunable sources of entangled photons: a viable concept for solid-state-based quantum relays
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- Micromachining of PMN-PT Crystals with Ultrashort Laser Pulses
- Opto-Mechanical Tuning of the Polarization Properties of Micropillar Cavity Systems with embedded Quantum Dots
- A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots
- Geometrical properties of strained and twisted moiré heterostructures