Enhanced quantum efficiency and reduction of reflection for MSM photodetectors with nano-structured surface
arXiv:1810.00945
Abstract
The photon trapping nano-structures help to enhance quantum efficiency and reduce reflection for MSM photodetector that allows fast Si photodetectors at wavelength 800-950nm. The nanostructure consist of micro holes reduces reflection and bends normally incident light into the lateral modes in the absorbing layer.
2 pages 1 figure. conference IEEE Photonics RAPID 2018