Performance of the Silicon-On-Insulator Pixel Sensor for X-ray Astronomy, XRPIX6E, Equipped with Pinned Depleted Diode Structure

Abstract

We have been developing event driven X-ray Silicon-On-Insulator (SOI) pixel sensors, called "XRPIX", for the next generation of X-ray astronomy satellites. XRPIX is a monolithic active pixel sensor, fabricated using the SOI CMOS technology, and is equipped with the so-called "Event-Driven readout", which allows reading out only hit pixels by using the trigger circuit implemented in each pixel. The current version of XRPIX has lower spectral performance in the Event-Driven readout mode than in the Frame readout mode, which is due to the interference between the sensor layer and the circuit layer. The interference also lowers the gain. In order to suppress the interference, we developed a new device, "XRPIX6E" equipped with the Pinned Depleted Diode structure. A sufficiently highly-doped buried p-well is formed at the interface between the buried oxide layer and the sensor layer, and acts as a shield layer. XRPIX6E exhibits improved spectral performances both in the Event-Driven readout mode and in the Frame readout mode in comparison to previous devices. The energy resolutions in full width at half maximum at 6.4 keV are 236 $\pm$ 1 eV and 335 $\pm$ 4 eV in the Frame and Event-Driven readout modes, respectively. There are differences between the readout noise and the spectral performance in the two modes, which suggests that some mechanism still degrades the performance in the Event-Driven readout mode.

13 pages, 5 figures, 1 table, accepted for publication in NIMA on September 27, 2018

References in corpus (3)

• Improvement of Spectroscopic Performance using a Charge-sensitive Amplifier Circuit for an X-Ray Astronomical SOI Pixel Detector
• Development and Performance of Kyoto's X-ray Astronomical SOI pixel (SOIPIX) sensor
• Evaluation of Kyoto's Event-Driven X-ray Astronomical SOI Pixel Sensor with a Large Imaging Area

Cited by in corpus (10)

• Radiation Damage Effects on Double-SOI Pixel Sensors for X-ray Astronomy
• Low-Energy X-ray Performance of SOI Pixel Sensors for Astronomy, "XRPIX"
• Proton radiation hardness of X-ray SOI pixel sensors with pinned depleted diode structure
• Measurement of Charge Cloud Size in X-ray SOI Pixel Sensors
• Subpixel Response of SOI Pixel Sensor for X-ray Astronomy with Pinned Depleted Diode: First Result from Mesh Experiment
• Design study and spectroscopic performance of SOI pixel detector with a pinned depleted diode structure for X-ray astronomy
• Radiation-Induced Degradation Mechanism of X-ray SOI Pixel Sensors with Pinned Depleted Diode Structure
• Single Event Tolerance of X-ray SOI Pixel Sensors
• X-ray Radiation Damage Effects on Double-SOI Pixel Detectors for the Future Astronomical Satellite "FORCE"
• A detailed study on spectroscopic performance of SOI pixel detector with a pinned depleted diode structure for X-ray astronomy