Fabrication of antenna-coupled KID array for Cosmic Microwave Background detection

Abstract

Kinetic Inductance Detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the $O(500,000)$ detectors needed for the upcoming Cosmic Microwave Background - Stage 4 (CMB-S4) experiment. We have fabricated antenna-coupled MKID array in the 150GHz band optimized for CMB detection. Our design uses a twin slot antenna coupled to inverted microstrip made from a superconducting Nb/Al bilayer and SiN${}_x$, which is then coupled to an Al KID grown on high resistivity Si. We present the fabrication process and measurements of SiN${}_x$ microstrip resonators.

7 pages, 9 figures, submitted to Journal of Low Temperature Physics

References in corpus (8)

• The NIKA2 instrument, a dual-band kilopixel KID array for millimetric astronomy
• Improving the Quality Factor of Microwave Compact Resonators by Optimizing their Geometrical Parameters
• MKID development for SuperSpec: an on-chip, mm-wave, filter-bank spectrometer
• MAKO: a pathfinder instrument for on-sky demonstration of low-cost 350 micron imaging arrays
• Development of dual-polarization LEKIDs for CMB observations
• Polarization Sensitive Multi-Chroic MKIDs
• Design and performance of the antenna coupled lumped-element kinetic inductance detector
• Multiplexed readout demonstration of a TES-based detector array in a resistance locked loop

Cited by in corpus (2)

• Nonlinear Effects in Superconducting Thin Film Microwave Resonators
• Reducing the susceptibility of lumped-element KIDs to two-level system effects