Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

Abstract

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.

7 pages, 4 figures

References in corpus (4)

• Nanomechanical Resonators and Their Applications in Biological/Chemical Detection: Nanomechanics Principles
• VO2: A Novel View from Band Theory
• Infrared spectroscopy and nano-imaging of the insulator-to-metal transition in vanadium dioxide
• Nanoscale electromechanical resonators as probes of the charge density wave transition in NbSe${}_2$

Cited by in corpus (3)

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