Buckled Diamond-like Carbon Nanomechanical Resonators

Abstract

We have developed capacitively-transduced nanomechanical resonators using sp${}^2$-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of $500{}^{\circ }$C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.

5 + 4 pages, 3 + 4 figures

References in corpus (4)

• Graphene mechanical oscillators with tunable frequency
• Probing thermal expansion of graphene and modal dispersion at low-temperature using graphene NEMS resonators
• Stamp transferred suspended graphene mechanical resonators for radio-frequency electrical readout
• Pick-up and drop transfer of diamond nanosheets

Cited by in corpus (2)

• Snap-through transition of graphene membranes for memcapacitor applications: A combined study using MD, DFT and elasticity theory
• Fabry-Perot Interferometric Calibration of 2D Nanomechanical Plate Resonators