Molybdenum-Rhenium alloy based high-$Q$ superconducting microwave resonators

Abstract

Superconducting microwave resonators (SMR) with high quality factors have become an important technology in a wide range of applications. Molybdenum-Rhenium (MoRe) is a disordered superconducting alloy with a noble surface chemistry and a relatively high transition temperature. These properties make it attractive for SMR applications, but characterization of MoRe SMR has not yet been reported. Here, we present the fabrication and characterization of SMR fabricated with a MoRe 60-40 alloy. At low drive powers, we observe internal quality-factors as high as 700,000. Temperature and power dependence of the internal quality-factors suggest the presence of the two level systems from the dielectric substrate dominating the internal loss at low temperatures. We further test the compatibility of these resonators with high temperature processes such as for carbon nanotube CVD growth, and their performance in the magnetic field, an important characterization for hybrid systems.

arXiv comment12 pages, 4 figures and Supplementary Material

References in corpus (19)

• Circuit Quantum Electrodynamics: Coherent Coupling of a Single Photon to a Cooper Pair Box
• High cooperativity in coupled microwave resonator ferrimagnetic insulator hybrids
• Strong Coupling of a Spin Ensemble to a Superconducting Resonator
• Planar Superconducting Resonators with Internal Quality Factors above One Million
• Circuit Quantum Electrodynamics with a Spin Qubit
• Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators
• Dipole coupling of a double quantum dot to a microwave resonator
• Cavity QED with magnetically coupled collective spin states
• Optomechanical coupling between a multilayer graphene mechanical resonator and a superconducting microwave cavity
• Tunable resonators for quantum circuits
• Microwave response of vortices in superconducting thin films of Re and Al
• Circuit QED using a semiconductor double quantum dot
• Contribution of dielectrics to frequency and noise of NbTiN superconducting resonators
• Photon mediated interaction between distant quantum dot circuits
• Magnetic hysteresis effects in superconducting coplanar microwave resonators
• Improving the performance of superconducting microwave resonators in magnetic fields
• Reducing microwave loss in superconducting resonators due to trapped vortices
• Coupling carbon nanotube mechanics to a superconducting circuit
• Molybdenum-Rhenium superconducting suspended nanostructures

Cited by in corpus (29)

• Magnetic field resilient superconducting coplanar waveguide resonators for hybrid cQED experiments
• Multi-mode ultra-strong coupling in circuit quantum electrodynamics
• A ballistic graphene superconducting microwave circuit
• Cavity electromechanics with parametric mechanical driving
• Ultra-low-noise Microwave to Optics Conversion in Gallium Phosphide
• Negative nonlinear damping of a graphene mechanical resonator
• Magnetic Field Dependent Microwave Losses in Superconducting Niobium Microstrip Resonators
• Approaching ultra-strong coupling in Transmon circuit-QED using a high-impedance resonator
• Enhanced Superconducting Transition Temperature in Electroplated Rhenium
• Sputtered MoRe SQUID-on-tip for high-field magnetic and thermal nanoimaging
• Superconducting Energy Scales and Anomalous Dissipative Conductivity in Thin Films of Molybdenum Nitride
• Superconducting contacts to a monolayer semiconductor
• Coplanar cavity for strong coupling between photons and magnons in van der Waals antiferromagnet
• Thickness dependent interlayer transport in vertical MoS2 Josephson junctions
• Broadband architecture for galvanically accessible superconducting microwave resonators
• Superconducting coplanar microwave resonators with operating frequencies up to 50 GHz
• Quantum paraelectricity probed by superconducting resonators
• A flux tunable superconducting quantum circuit based on Weyl semimetal MoTe2
• Superconducting vortex-charge measurement using cavity electromechanics
• Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators
• Superconducting Pb stripline resonators in parallel magnetic field and their application for microwave spectroscopy
• Quartz tuning-fork based carbon nanotube transfer into quantum device geometries
• InAs/MoRe hybrid semiconductor/superconductor nanowire devices
• Optomechanical microwave amplification without mechanical amplification
• Towards carbon nanotube growth into superconducting microwave resonator geometries
• Nanoelectromechanical resonators from high-T${}_c$ superconducting crystals of Bi${}_2$Sr${}_2$Ca${}_1$Cu${}_2$O${}_{8+\delta }$
• Localization of electronic states resulting from electronic topological transitions in the Mo${}_{1-x}$Re${}_x$ alloys: A photoemission study
• Mechanical dissipation in MoRe superconducting metal drums
• Fabrication and Characterization of Magnetic-Field-Resilient MoRe Superconducting Coplanar Waveguide Resonators