Molecular-absorption-induced thermal bistablity in PECVD silicon nitride microring resonators

Abstract

The wavelength selective linear absorption in communication C-band is investigated in CMOS-processed PECVD silicon nitride rings. In the overcoupled region, the linear absorption loss lowers the on-resonance transmission of a ring resonator and increases its overall quality factor. Both the linear absorption and ring quality factor are maximized near 1520 nm. The direct heating by phonon absorption leads to thermal optical bistable switching in PECVD silicon nitride based microring resonators. We calibrate the linear absorption rate in the microring resonator by measuring its transmission lineshape at different laser power levels, consistent with coupled mode theory calculations.

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Cited by in corpus (4)

• Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries
• Thermal investigation of bistability in high index doped silica integrated ring resonators
• Optical bistability in a one-dimensional photonic crystal resonator using a reverse-biased pn-junction
• Nonlinear optical bistability in microring resonators for enhanced phase sensing