Helium Ion Microscopy

Abstract

Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.

Revised version

References in corpus (2)

• Etching of Graphene Devices with a Helium Ion Beam
• Cutting and controlled modification of graphene with ion beams

Cited by in corpus (22)

• Nanopore fabrication and characterization by helium ion microscopy
• Bright focused ion beam sources based on laser-cooled atoms
• Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry
• Anomalous stopping and charge transfer in proton-irradiated graphene
• A reduction-to-absurdity approach using absolutely smooth solid surfaces to unveil the origins of wetting
• Helium Ion Microscopy for Reduced Spin Orbit Torque Switching Currents
• Lateral heterostructures of two-dimensional materials by electron-beam induced stitching
• Pre-equilibrium stopping and charge capture in proton-irradiated aluminum sheets
• Ultradense Tailored Vortex Pinning Arrays in Superconducting YBa${}_2$Cu${}_3$O${}_{7-\delta }$ Thin Films Created by Focused He Ion Beam Irradiation for Fluxonics Applications
• Time-Resolved Focused Ion Beam Microscopy: Modeling, Estimation Methods, and Analyses
• A comparative study of resists and lithographic tools using the Lumped Parameter Model
• Site-controlled formation of single Si nanocrystals in a buried SiO2 matrix using ion beam mixing
• Optical Nanoscopy of High-Tc Cuprate Nano-Constriction Devices Patterned by Helium Ion Beams
• A high repetition deterministic single ion source
• Morphology modifcation of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm
• Visualization of steps and surface reconstructions in Helium Ion Microscopy with atomic precision
• Ion-beam sculpting of nanowires
• Ultralong-term high-density data storage with atomic defects in SiC
• Single quantum dot selection and tailor-made photonic device integration using nanoscale focus pinspot
• Systematic characterization of nanoscale $h$-BN quantum sensor spots created by helium-ion microscopy
• Origin of performance enhancement of superconducting nanowire single-photon detectors by He-ion irradiation
• Electronic excitation of transition metal nitrides by light ions with keV energies