Composition and structure of Pd nanoclusters in SiO${}_x$ thin film

Abstract

The nucleation, distribution, composition and structure of Pd nanocrystals in SiO${}_2$ multilayers containing Ge, Si, and Pd are studied using High Resolution Transmission Electron Microscopy (HRTEM) and X-ray Photoelectron Spectroscopy (XPS), before and after heat treatment. The Pd nanocrystals in the as deposited sample seem to be capped by a layer of PdO${}_x$. A 1-2 eV shift in binding energy was found for the Pd-3d XPS peak, due to initial state Pd to O charge transfer in this layer. The heat treatment results in a decomposition of PdO and Pd into pure Pd nanocrystals and SiO${}_2$.

References in corpus (3)

• An experimental study of charge distribution in crystalline and amorphous Si nanoclusters in thin silica films
• The formation of Er-oxide nanoclusters in SiO${}_2$ thin films with excess Si
• Characterization of amorphous and crystalline silicon nanoclusters in ultra thin silica layers