Dissipation of micro-cantilevers as a function of air pressure and metallic coating

Abstract

In this letter, we characterize the internal dissipation of coated micro-cantilevers through their mechanical thermal noise. Using a home-made interferometric setup, we achieve a resolution down to 1E-14m/rtHz in the measurement of their deflection. With the use of the fluctuation dissipation theorem and of the Kramers-Kronig relations, we rebuilt the full mechanical response function from the measured noise spectrum, and investigate frequency dependent dissipation as a function of the air pressure and of the nature of the metallic coatings. Using different thicknesses of gold coatings, we discuss the source of the internal viscoelastic damping.

Cited by in corpus (4)

• Quadrature phase interferometer for high resolution force spectroscopy
• Measurements of mechanical thermal noise and energy dissipation in optical dielectric coatings
• Resonance frequency shift of strongly heated micro-cantilevers
• Low thermal fluctuations in a system heated out of equilibrium