Diamond Processing by Focused Ion Beam - Surface Damage and Recovery

Abstract

The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a detrimental effect on the color center luminescence. The FIB processing effect on single crystal diamond surfaces and their photonic properties is studied by Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and photoluminescence (PL). Exposing the processed surface to hydrogen plasma, followed by chemical etching, drastically decreases implanted Ga concentration, resulting in a recovery of the NV- photo-emission and in a significant increase of the NV-/NV0 ratio.

12 pages, 3 figures

References in corpus (3)

• Scalable quantum register based on coupled electron spins in a room temperature solid
• Fabrication and Characterization of Two-Dimensional Photonic Crystal Microcavities in Nanocrystalline Diamond
• The Photonic Module: an on-demand resource for photonic entanglement

Cited by in corpus (7)

• Systematic study of defect-related quenching of NV luminescence in diamond with time correlated single photon counting spectroscopy
• Diamond as a material for monolithically integrated optical and optomechanical devices
• Engineering electron-phonon coupling of quantum defects to a semi-confocal acoustic resonator
• Subtractive 3D Printing of Optically Active Diamond Structures
• Structural transformation of implanted diamond layers during high temperature annealing
• Patterning of diamond with 10 nm resolution by electron-beam-induced etching
• Direct-write milling of diamond by a focused oxygen ion beam