Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement

Abstract

We measure the mechanical thermal noise of soft silicon atomic force microscopy cantilevers. Using an interferometric setup, we have a resolution down to 1E-14 m/rtHz on a wide spectral range (3 Hz to 1E5 Hz). The low frequency behavior depends dramatically on the presence of a reflective coating: almost flat spectrums for uncoated cantilevers versus 1/f like trend for coated ones. The addition of a viscoelastic term in models of the mechanical system can account for this observation. Use of Kramers-Kronig relations validate this approach with a complete determination of the response of the cantilever: a power law with a small coefficient is found for the frequency dependence of viscoelasticity due to the coating, whereas the viscous damping due to the surrounding atmosphere is accurately described by the Sader model.

References in corpus (3)

• Thermoelastic Damping in Micro- and Nano-Mechanical Systems
• Determining Microscopic Viscoelasticity in Flexible and Semiflexible Polymer Networks from Thermal Fluctuations
• Thermal noise of microcantilevers in viscous fluids

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• Calibrated force measurement in Atomic Force Microscopy using the Transient Fluctuation Theorem
• Excitation frequency dependence of noise and minimum detectable force in amplitude-modulation atomic force microscopy