A Terraced Scanning Superconducting Quantum Interference Device Susceptometer with Sub-Micron Pickup Loops

Abstract

Superconducting Quantum Interference Devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pick-up loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pick-up loops 300 nm from the sample. The 600 nm - 2 um pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ~70 electron spins per root Hertz at 4K.

See http://stanford.edu/group/moler/publications.html for an auxiliary document containing additional fabrication details and discussion

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• Fluctuation Superconductivity in Mesoscopic Aluminum Rings
• Simple Phase Bias for Superconducting Circuits
• Superconducting thin rings with finite penetration depth

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