2 papers
cond-mat.supr-con2026
Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
quant-ph2026
Krypton-sputtered tantalum films for scalable high-performance quantum devices
Maciej W. Olszewski, Lingda Kong, Simon Reinhardt +9
Superconducting qubits based on tantalum (Ta) thin films have demonstrated the highest-performing microwave resonators and qubits. This makes Ta an attractive material for supercon…