86 citations
- S. Burger2 profiles26 · h 36
- L. Zschiedrich20 · h 23
- M. Hammerschmidt14 · h 15
- F. Schmidt2 profiles13 · h 26
- Sven Burger4 profiles11 · h 5
- F. Binkowski10 · h 12
- Philipp-Immanuel Schneider2 profiles10 · h 14
- F. Betz9 · h 8
- J. Pomplun8 · h 14
- C. Rockstuhl3 profiles5 · h 66
- Matthias Plock5 · h 4
- A. Govorov3 · h 89
- Zuse Institute BerlinDE37 papers
- Karlsruhe Institute of TechnologyDE6 papers
- Physikalisch-Technische BundesanstaltDE6 papers
- Technische Universität BerlinDE5 papers
- Humboldt-Universität zu BerlinDE3 papers
- Ohio UniversityUS3 papers
- Advanced Mask Technology Center (Germany)DE2 papers
- Helmholtz-Zentrum Berlin für Materialien und EnergieDE2 papers
- University of StuttgartDE2 papers
- Centre de Recherche sur l'Hétéro-Epitaxie et ses ApplicationsFR1 paper
- Centre National de la Recherche ScientifiqueFR1 paper
- Chengdu UniversityCN1 paper
4 papers · 1 filter
Measuring the electromagnetic chirality of 2D arrays under normal illumination
X. Garcia-Santiago, S. Burger, C. Rockstuhl +1
We present an electromagnetic chirality measure for 2D arrays of subwavelength periodicities under normal illumination. The calculation of the measure uses only the complex reflect…
An efficient approach to global sensitivity analysis and parameter estimation for line gratings
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Scatterometry is a fast, indirect and nondestructive optical method for the quality control in the production of lithography masks. Geometry parameters of line gratings are obtaine…
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…
Heuristic Modeling of Strong Coupling in Plasmonic Resonators
Günter Kewes, Felix Binkowski, Sven Burger +2
Strong coupling of plasmonic excitations and dipolar emitters, such as organic molecules, have been studied extensively in the last years. The questions whether strong coupling can…