13 citations
4 papers · 1 filter
Benchmark of Rigorous Methods for Electromagnetic Field Simulations
S. Burger, L. Zschiedrich, F. Schmidt +2
We have developed an interface which allows to perform rigorous electromagnetic field (EMF) simulations with the simulator JCMsuite and subsequent aerial imaging and resist simulat…
FEM investigation of leaky modes in hollow core photonic crystal fibers
J. Pomplun, R. Holzlöhner, S. Burger +2
Hollow-core holey fibers are promising candidates for low-loss guidance of light in various applications, e.g., for the use in laser guide star adaptive optics systems in optical a…
Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components
L. Zschiedrich, S. Burger, J. Pomplun +1
Adaptive finite elements are the method of choice for accurate simulations of optical components. However as shown recently by Bienstman et al. many finite element mode solvers fai…
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…