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Showing 2025 · cs.LGShow all
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cs.LG2025★ 3 cited
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
How can we identify problematic upstream processes when a certain type of wafer defect starts appearing at a quality checkpoint? Given the complexity of modern semiconductor manufa…
cs.LG2025★ 2 cited
Wafer Defect Root Cause Analysis with Partial Trajectory Regression
Kohei Miyaguchi, Masao Joko, Rebekah Sheraw +1
Identifying upstream processes responsible for wafer defects is challenging due to the combinatorial nature of process flows and the inherent variability in processing routes, whic…