most citedEvidence for structural transition in crystalline tantalum pentoxide films grown by RF magnetron sputtering

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cond-mat.supr-con2017★ 35 cited

Evidence for structural transition in crystalline tantalum pentoxide films grown by RF magnetron sputtering

Israel Perez, José Luis Enríquez Carrejo, Víctor Sosa +4

We investigate the effect of annealing temperature on the crystalline structure and physical properties of tantalum-pentoxide films grown by radio frequency magnetron sputtering. F…