2 papers
cond-mat.mtrl-sci2018
Effect of Ion Bombardment on the Chemical Properties of Crystalline Tantalum Pentoxide Films
Israel Perez, Victor Sosa, Fidel Gamboa Perera +3
The effect of argon ion bombardment on the chemical properties of crystalline TaO films grown on Si(100) substrates by radio frequency magnetron sputtering was investigated…
cond-mat.supr-con2017
Evidence for structural transition in crystalline tantalum pentoxide films grown by RF magnetron sputtering
Israel Perez, José Luis Enríquez Carrejo, Víctor Sosa +4
We investigate the effect of annealing temperature on the crystalline structure and physical properties of tantalum-pentoxide films grown by radio frequency magnetron sputtering. F…