Bauman Moscow State Technical University

most citedInvestigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

1 citations

researchers with a paper here

A. A. Matveev1 · h 2
A. Andriyash1 · h 8
A. A. Zabolotnykh1 · h 7
A. I. Ivanov1 · h 2
A. Matanin1 · h 3
A. Safin1 · h 7
D. A. Baklykov1 · h 1
D. A. Rodionov1 · h 2
D. Fokin1 · h 8
D. Kalyabin1 · h 8
E. Krivko1 · h 3
E. Malevannaya1 · h 6

collaborating institutions

All Russia Research Institute of AutomaticsRU1 paper
Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of SciencesRU1 paper
Moscow Aviation InstituteRU1 paper
Moscow Institute of Physics and TechnologyRU1 paper
Moscow Power Engineering InstituteRU1 paper
Saratov State UniversityRU1 paper

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quant-ph2026★ 1 cited

Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

E. V. Zikiy, N. S. Smirnov, E. A. Krivko +13

Alpha-tantalum on silicon is a promising platform for high-coherence superconducting quantum circuits. However, the growth mechanism of alpha-tantalum on silicon remains poorly und…