most citedInvestigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

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quant-ph2026★ 1 cited

Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

E. V. Zikiy, N. S. Smirnov, E. A. Krivko +13

Alpha-tantalum on silicon is a promising platform for high-coherence superconducting quantum circuits. However, the growth mechanism of alpha-tantalum on silicon remains poorly und…