Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks

A. Bennis, C. Leinenbach, C. Raudzis +2

Using Rayleigh surface acoustic waves (SAW), the Young's modulus, the density and the thickness of polycrystalline Silicon-Germanium (SiGe) films deposited on silicon and SiO2 were…