Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling

Joseph G. Theis, Gregory R. Werner, Thomas G. Jenkins +2

We reproduce the consistently-seen experimental voltage versus pressure (V-p) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by…