2 papers
physics.plasm-ph2026
Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling
Joseph G. Theis, Gregory R. Werner, Thomas G. Jenkins +2
We reproduce the consistently-seen experimental voltage versus pressure (V-p) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by…
physics.plasm-ph2025
Modeling the Role of Secondary Electron Emission in Direct Current Magnetron Sputtering using Explicit Energy-Conserving Particle-in-Cell Methods
Daniel Main, Thomas G. Jenkins, Joseph G. Theis +5
We present results from a fully kinetic particle-in-cell (PIC) simulation of direct current magnetron sputtering (dcMS) in a 2D cylindrically symmetric geometry. The particle-in-ce…