Enhancement of piezoelectric response in V doped LiNbO3 films deposited by RF magnetron sputtering

Xiaomei Zeng, Ting Lv, Xiangyu Zhang +5

LiNbO3 films doped with vanadium (V) were deposited using RF magnetron sputtering technique. To realize doping with a wider range of V concentration, a 30 mm V metal inlaid target…