14 citations
2 papers
cond-mat.mtrl-sci2025★ 8 cited
3D Atomic-Scale Metrology of Strain Relaxation and Roughness in Gate-All-Around (GAA) Transistors via Electron Ptychography
Shake Karapetyan, Steven E. Zeltmann, Glen Wilk +3
To improve transistor density and electronic performance, next-generation semiconductor devices are adopting three-dimensional architectures and feature sizes down to the few-nm re…
cond-mat.mtrl-sci2025★ 14 cited
PtyRAD: A High-performance and Flexible Ptychographic Reconstruction Framework with Automatic Differentiation
Chia-Hao Lee, Steven E. Zeltmann, Dasol Yoon +2
Electron ptychography has recently achieved unprecedented resolution, offering valuable insights across diverse material systems, including in three dimensions. However, high-quali…