Material Measurement Laboratory

output

20122026

most citedJDFTx: software for joint density-functional theory

405 citations

researchers with a paper here

Kathleen A. Schwarz3 · h 20
R. Sundararaman3 · h 39
A. Davydov2 · h 47
A. Naing2 · h 6
B. Blaiszik2 · h 32
Duming Zhang2 profiles2 · h 11
E. Takacs2 · h 3
J. Ullom2 · h 49
J. Vinson2 · h 21
J. W. Fowler2 · h 11
K. Choudhary2 · h 26
K. Morgan2 · h 19

collaborating institutions

National Institute of Standards and TechnologyUS33 papers
University of Maryland, College ParkUS11 papers
Physical Measurement LaboratoryUS7 papers
Argonne National LaboratoryUS5 papers
Joint Quantum InstituteUS5 papers
Rensselaer Polytechnic InstituteUS4 papers
Carnegie Mellon UniversityUS3 papers
Lawrence Berkeley National LaboratoryUS3 papers
University of ChicagoUS3 papers
Center for Nanoscale Science and TechnologyUS2 papers
Centre National de la Recherche ScientifiqueFR2 papers
Commissariat à l'Énergie Atomique et aux Énergies AlternativesFR2 papers

Showing 2019 · physics.app-phShow all

1 paper · 2 filters

physics.app-ph2019★ 12 cited

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3

Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…