405 citations
- National Institute of Standards and TechnologyUS21 papers
- University of Maryland, College ParkUS8 papers
- Joint Quantum InstituteUS4 papers
- Physical Measurement LaboratoryUS4 papers
- Argonne National LaboratoryUS3 papers
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- Center for Nanoscale Science and TechnologyUS2 papers
- Northwestern UniversityUS2 papers
- Seoul National UniversityKR2 papers
- Université Bourgogne Franche-ComtéFR2 papers
- Carnegie Mellon UniversityUS1 paper
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physics.app-ph2020
Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy
Hongxuan Guo, Alexander Yulaev, Evgheni Strelcov +5
Electrical double layers play a key role in a variety of electrochemical systems. The mean free path of secondary electrons in aqueous solutions is on the order of a nanometer, mak…
physics.app-ph2019★ 12 cited
Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…